A series of α-mono- and α,α-difluoro-β-ketophosphonates were synthesized in moderate to good yields with excellent selectivities via electrophilic fluorination by Selectfluor. Subsequently, synthetic potential of the obtained α-monofluoro-β-ketophosphonates was demonstrated by their application in synthesis of α-monofluoro-β-aminophosphonates, useful building blocks in the preparation of phosphapeptides.